Mechanics and Physics of Precise Vacuum Mechanisms Rutilius Taurus Aemilianus 2) werden die Voraussetzungen für

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das für die eigenen Bedürfnisse und den vorhandenen Grad an Expertise passende System zu finden

Mechanics and Physics of Precise Vacuum Mechanisms Rutilius Taurus Aemilianus 2) werden die Voraussetzungen fürIn this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision